With the Nano Focus Probe, the workpiece surface can be captured as a 3D point cloud and the size, mould, position and roughness on micro-structures can be evaluated. Stray light suppression enables reliable 3D measurement of the topography even of reflective surfaces with probing errors in the submicrometre range. The confocal optical sensor also delivers good results on steep flanks with large angles of inclination.
-
Applications
- 3D free-form workpieces
- Extruded workpieces
- Moulds
- Semiconductor workpieces
- Lithographic structures
- Metal-plastic composite workpieces
- Prismatic workpieces
- Punched and bent parts
- Packaging
- Shaft-hub connections
- Shafts and axes
- Workpieces with micro-features
- Workpieces with optical functional surfaces
- Tools with geometrically determined cutting edges
- Tools with geometrically indeterminate cutting edges
- Gear wheels
- Cylindrical workpieces
- Industries
- Products
- Service
- About Werth
- Careers
- Foundation
- Publications
- Downloads