Important geometrical characteristics are the hole pattern and the distances between the structures. With tolerances of a few tenths of a millimetre, the requirements for measurement uncertainty are in the low range. The demands on the measuring time are usually very high.
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Applications
- 3D free-form workpieces
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- Moulds
- Semiconductor workpieces
- Lithographic structures
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- Shaft-hub connections
- Shafts and axles
- Workpieces with micro-features
- Workpieces with optical functional surfaces
- Tools with geometrically defined cutting edges
- Tools with geometrically undefined cutting edges
- Gears
- Cylindrical workpieces
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