Thanks to special air bearing technology, integrated vibration insulation, temperature-stable scale and drive systems and a high-performance control system, the achievable length measurement errors of the highly accurate (ultra accuracy) multi-sensor coordinate measuring machine are in the range of a few tenths of a µm. The main applications are precision workpieces and 3D micro-geometries.
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Applications
- 3D free-form workpieces
- Extruded workpieces
- Moulds
- Semiconductor workpieces
- Lithographic structures
- Metal-plastic composite workpieces
- Prismatic workpieces
- Stamped and bent parts
- Packaging
- Shaft-hub connections
- Shafts and axles
- Workpieces with micro-features
- Workpieces with optical functional surfaces
- Tools with geometrically defined cutting edges
- Tools with geometrically undefined cutting edges
- Gears
- Cylindrical workpieces
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