By using a high-performance transmission target with separate cooling and refocusing of the electron beam, these sources offer focal spot sizes in the sub-micrometre range. Evaluations of micro-structures such as particles, fibres, layer thicknesses, micro-cracks or voids are no problem. With acceleration voltages of up to 240 kV, even small metal workpieces can be tomographed and evaluated with micrometre precision.
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Applications
- 3D free-form workpieces
- Extruded workpieces
- Moulds
- Semiconductor workpieces
- Lithographic structures
- Metal-plastic composite workpieces
- Prismatic workpieces
- Stamped and bent parts
- Packaging
- Shaft-hub connections
- Shafts and axles
- Workpieces with micro-features
- Workpieces with optical functional surfaces
- Tools with geometrically defined cutting edges
- Tools with geometrically undefined cutting edges
- Gears
- Cylindrical workpieces
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