By using a high power transmission target, these sources offer focal spot sizes of a few microns even at high powers. This allows up to five times higher measuring speed compared to sources with reflection target. Due to the high acceleration voltages of up to 300 kV, even dense and larger workpieces or assemblies can be measured with high resolution in the shortest possible time.
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Applications
- 3D free-form workpieces
- Extruded workpieces
- Moulds
- Semiconductor workpieces
- Lithographic structures
- Metal-plastic composite workpieces
- Prismatic workpieces
- Stamped and bent parts
- Packaging
- Shaft-hub connections
- Shafts and axles
- Workpieces with micro-features
- Workpieces with optical functional surfaces
- Tools with geometrically defined cutting edges
- Tools with geometrically undefined cutting edges
- Gears
- Cylindrical workpieces
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