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Lithographic structures

Measurement of lithographic structures

Lithography is one of the central methods for manufacturing integrated circuits and other products. Distances, radii, angles and mould and position deviations are measured. The requirements for measurement uncertainty are in the medium to high range. The measurement time requirements are high, as measurements are usually taken during the process.

Glass standards
Glass standards
Printed circuit boards
Printed circuit boards
Products
Products
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