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Nano Focus Probe NFP

Highly accurate confocal sensor

Benefits

Highly accurate topography measurements independent of reflectivity

With the Nano Focus Probe, the workpiece surface can be captured as a 3D point cloud and the size, mould, position and roughness on micro-structures can be evaluated. Stray light suppression enables reliable 3D measurement of the topography even of reflective surfaces with probing errors in the submicrometre range. The confocal optical sensor also delivers good results on steep flanks with large angles of inclination.

Please accept "Other" in the settings to watch this video.Other benefits

Other benefits

  • Different lenses allow the sensor to be adapted to the task at hand
  • The sensor can be used in the entire measuring volume of the coordinate measuring machine and the measurement results can be linked in the same coordinate system
  • A total surface can be calculated from several adjacent partial point clouds almost without loss of accuracy
Technical Data
Technical Data

Sensor principle

Optical-axial (confocal microscopy)

Measuring range

Measurement "in the image" with integrated Z-axis 250 µm

Accuracy

Permissible probing error up to 0.15 µm

Functionality

By moving the probe head with a) illumination, b) camera, c) pinhole and d) imaging optics relative to the workpiece e) the intensity of the light points f), g) is varied by defocusing. The overlapping of the defocused light points f) is avoided by large distances g).

Functionality
Compatible Sensor Principles
Werth Image Processing BV
Sensor
Werth Image Processing BV
Autofocus sensor
Sensor
Autofocus sensor
Machines and Accessories
Filter

Further equipment for Nano Focus Probe NFP

VideoCheck® S
Machine
VideoCheck® S
VideoCheck® FB
Machine
VideoCheck® FB
VideoCheck® HA
Machine
VideoCheck® HA
VideoCheck® UA
Machine
VideoCheck® UA
VideoCheck® V HA
Machine
VideoCheck® V HA
Inspector® FQ
Machine
Inspector® FQ
Rotary axis
Accessories
Rotary axis
Rotary/tilt axis
Accessories
Rotary/tilt axis
Telecentric lenses with fixed magnification
Accessories
Telecentric lenses with fixed magnification
Software - The universal measurement software for coordinate measuring machines with optics, probe, computed tomography and multi-sensor systems
Software

The universal measurement software for coordinate measuring machines with optics, probe, computed tomography and multi-sensor systems

The operation of machines with different sensors, but also the evaluation of volume data and point clouds ...
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Service - Comprehensive service around the coordinate measuring machine
Service

Comprehensive service around the coordinate measuring machine

Services from initial commissioning, training and maintenance to retrofitting ...
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Applications

Workpiece examples Nano Focus Probe NFP

Contact
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